Gate dielectric integrity : material, process, and tool qualification

Dinesh C. Gupta and George A. Brown, editors
Bok · Engelsk · 2000

Utgitt	West Conshohocken, Pa. : ASTM , 2000
Omfang	XI, 169 s. : ill.
Opplysninger	"The Conference on Gate Dielectric Integrity was held on January 25, 1999 in San Jose, California" - Forordet
Emner	Dielectrics - Testing Gate array circuits - Materials Integrated circuits - Wafer-scale integration Reliability Semiconductor wafers - Reliability Vis mer... Silicon oxide films - Testing Halvledere (Elektronikk) Integrerte kretser - Pålitelighet
ISBN	0803126158