Thin film metallurgy for microelectronics : physical and technical studies of Si-metal reactions
Shaofang Gong
Bok Engelsk 1990
| Utgitt | Linköping : Department of Physics and Measurement Technology, University of Linköping , 1990
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|---|---|
| Omfang | 112 s. : ill.
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| Opplysninger | Avh. (tekn. dr.) - Tekniska högskolan i Linköping, 1990.
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| Emner | |
| ISBN | 9178705894
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