A guide to hands-on MEMS design and prototyping
Joel Kubby.
Bok Engelsk 2011 Joel A. Kubby
| Annen tittel | |
|---|---|
| Omfang | 1 online resource (xi, 166 pages) : : digital, PDF file(s).
|
| Opplysninger | Title from publisher's bibliographic system (viewed on 05 Oct 2015).. - Machine generated contents note: 1. Introduction; 2. Micro-mechanics; 3. Electrostatics; 4. Optical MEMS; 5. Thermal MEMS; 6. Fluidic MEMS; 7. Package and test; 8. From prototype to product: MEMS deformable mirrors for adaptive optics.. - Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well as exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online.
|
| Emner | |
| Dewey | |
| ISBN | 0-511-98466-9. - 1-107-21936-1. - 1-139-11206-6. - 1-139-11425-5. - 1-139-11642-8. - 1-139-12216-9. - 1-139-12411-0. - 1-139-12708-X. - 1-283-29560-1. - 9786613295606
|
