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Fundamentals of microfabrication and nanotechnology. Vol. 1. Solid state physics, fluidics, and analytical techniques in micro- and nanotechnology
By Marc J. Madou
Bok Engelsk 2012
Fundamentals of microfabrication and nanotechnology. Vol. 2. Manufacturing techniques for microfabrication and nanotechnology
Marc J. Madou
Bok Engelsk 2012
Fundamentals of microfabrication and nanotechnology. Vol. 3. From MEMS to bio-MEMS and bio-NEMS
Marc J. Madou
Bok Engelsk 2012
Fundamentals of microfabrication : the science of miniaturization
Marc J. Madou
Bok Engelsk 2002