Levitation micro-systems : applications to sensors and actuators /
Kirill Poletkin.
Bok Engelsk 2021 · Electronic books.
| Utgitt | Springer International Publishing
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|---|---|
| Omfang | 1 online resource (IX, 174 p. 93 illus., 91 illus. in color.)
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| Utgave | 1st ed. 2021.
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| Opplysninger | Introduction to levitation micro-systems -- Micro-fabrication techniques -- Analytical modelling -- Quasi-finite element modelling -- Inductive levitation micro-systems -- Hybrid levitation micro-systems -- Mechanical thermal noise in levitated micro-gyroscopes.. - This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and –actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and –accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements.
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| Emner | |
| Sjanger | |
| Dewey | |
| ISBN | 3-030-58908-0
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