MEMS and microsystems : design, manufacture, and nanoscale engineering
Tai-Ran Hsu
Bok Engelsk 2008
| Utgitt | Hoboken, N.J. : Wiley , c2008
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|---|---|
| Omfang | XXV, 550 s. : ill.
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| Utgave | 2nd ed.
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| Emner | Microelectromechanical systems
Microelectronic packaging Microelectronics nanoteknologi mikroelektronikk mems pakketeknologi |
| ISBN | 9780470083017
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