Electron beam interactions with solids for microscopy, microanalysis & microlithography : proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA
edited by David F. Kyser ... [et al.] ; managing editor: Daniel Halibey
Bok Engelsk 1984 Pfefferkorn Conference
Utgitt | AMF O'Hare, Ill. : Scanning Electron Microscopy, Inc. , c1984
|
---|---|
Omfang | VIII, 372, s. IX-XII : ill.
|
Emner | Backscattering - Congresses
Electron beams - Congresses Electron energy loss spectroscopy - Congresses Electrons - Scattering Congresses Vis mer... Microlithography - Congresses
Solids - Effect of radiation on Congresses Elektronmikroskopi Elektronstråler Faste stoffers fysikk - Elektronstråler Kondenserte fasers fysikk faststoffysikk elektronstråler elektronmikroskopi mikroanalyse mikrolitografi |
ISBN | 0931288304
|