MEMS & microsystems : design and manufacture
Tai-Ran Hsu
Bok Engelsk 2002
| Utgitt | Boston : McGraw-Hill , c2002
|
|---|---|
| Omfang | XII, 436 s. : ill.
|
| Emner | Microelectromechanical systems
Microelectronic packaging Microelectronics MEMS mems mikroelektronikk mikroteknologi pakketeknologi |
| ISBN | 0071130519. - 0072393912
|
