Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A.
editors: Harold Kahn ... [et al.]
Bok Engelsk 2001
| Utgitt | Warrendale, Pa. : Materials Research Society , c2001
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|---|---|
| Omfang | 1 b. (flere pag.) : ill.
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| Emner | |
| ISBN | 1558995676. - 9781558995673
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